@book{772286,
  author = {V Tsai and Theodore Vorburger and Ronald Dixson and Joseph Fu and R Koning and Richard Silver and Edwin Williams},
  title = {The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calib Standards With a Calibrated AFM at NIST},
  year = {2005},
  month = {2005-09-29 00:09:00},
  publisher = {American Institute of Physics Press, New York, NY},
  language = {en},
}