@article{772046,
  author = {John Dagata and T Inoue and J Itoh and H Yokoyama},
  title = {Understanding Scanned Probe Oxidation of Silicon},
  year = {1998},
  number = {73(2)},
  month = {1998-01-01 00:01:00},
  publisher = {Applied Physics Letters},
  language = {en},
}