@conference{772001,
  author = {K Morimoto and L Morita and K Ohnaka and John Dagata},
  title = {Lateral SiOx Tunnel Barrier Formation for Si-based Tunnel Transistor Using Scanned Probe Oxidation},
  year = {2000},
  month = {2000-11-01 00:11:00},
  publisher = {MITI R&D Program (Quantum Functional Device Project) supported by NEDO, Kanazawa, 1, JA},
  language = {en},
}