@conference{771946,
  author = {J Lowney and Michael Postek and Andras Vladar},
  title = {A Monte Carlo Model for SEM Linewidth Metrology},
  year = {1994},
  number = {2196},
  month = {1994-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Integrated Circuit Metrology, Inspection, and Process Control VIII, Marylyn H. Bennett, Editor, San Jose, CA, USA},
  language = {en},
}