@article{771931,
  author = {Michael Postek and Andras Vladar and J Lowney and Robert Larrabee and William Keery},
  title = {Inverse Electron Beam Modeling and Metrology Research},
  year = {1998},
  number = {20(3)},
  month = {1998-04-01 00:04:00},
  publisher = {Scanning},
  language = {en},
}