@conference{771621,
  author = {Richard Silver and James Potzick and Robert Larrabee},
  title = {Overlay Measurements and Standards},
  year = {1995},
  number = {2439},
  month = {1995-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Santa Clara, CA, USA},
  language = {en},
}