@conference{771556, author = {R Koning and Ronald Dixson and Joseph Fu and V Tsai and Theodore Vorburger and Edwin Williams and X Wang}, title = {Pitch and Step Height Measurements Using NIST}, year = {1997}, month = {1997-01-01 00:01:00}, publisher = {Proceedings of 2nd Seminar on Quantitative Microscopy, , PTB Report F-30, K. Hasche, W. Mirande, and G. Wilkening, Editors, PTB Braunschweig, 1, GE}, language = {en}, }