@article{770686,
  author = {Li-Anne Liew and John Moreland and V Gerginov},
  title = {Wafer-Level Filling of Microfabricated Atomic Vapor Cells Based on Thin-Film Deposition and Photolysis of Cesium Azide},
  year = {2007},
  number = {90},
  month = {2007-03-15 00:03:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32542},
  language = {en},
}