@article{770366,
  author = {Jihui Yang and Joseph Kopanski and A Postula and M Bialkowski},
  title = {Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy},
  year = {2004},
  number = {45},
  month = {2004-12-20 00:12:00},
  publisher = {Microelectronics Reliability},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31737},
  language = {en},
}