@misc{770166,
  author = {Emre Yarimbiyik and Harry Schafft and Richard Allen and Mona Zahgoul and David Blackburn},
  title = {Implementation of Simulation Program for Modeling the Effective Resistivity of Nanometer Scale Film and Line Interconnects},
  year = {2006},
  month = {2006-02-01 00:02:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32006},
  doi = {https://doi.org/10.6028/NIST.IR.7234},
  language = {en},
}