@article{770156,
  author = {Amanda Goyettes and Yicheng Wang and James Olthoff},
  title = {Inductively Coupled Plasmas in Low Global Warming Potential Gases},
  year = {2000},
  number = {33},
  month = {2000-08-01 00:08:00},
  publisher = {Journal of Physics D-Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=29982},
  language = {en},
}