@article{770106, author = {Gyoung Buh and Joseph Kopanski and Jay Marchiando and Anthony Birdwell and Young Kuk}, title = {Factors Influencing the Capacitance-voltage Characteristics Measured by the Scanning Capacitance Microscope}, year = {2003}, number = {94}, month = {2003-08-15 00:08:00}, publisher = {Journal of Applied Physics}, language = {en}, }