@conference{769996,
  author = {Mehmet Ozgur and Mona Zaghloul and Michael Gaitan},
  title = {High Q Backside Micromachined CMOS Inductors},
  year = {1999},
  month = {1999-08-01 00:08:00},
  publisher = {Proc., 1999 IEEE International Symposium on Circuits and Systems, Orlando, FL, USA},
  language = {en},
}