@article{769851, author = {Todd Harvey and Kristine Bertness and Robert Hickernell and C. Wang and Jolene Splett}, title = {Accuracy of AlGaAs Growth Rates and Composition Determination Using RHEED Oscillations}, year = {2003}, number = {251}, month = {2003-01-01 00:01:00}, publisher = {Journal of Crystal Growth}, language = {en}, }