@article{769846, author = {Jonathan Guyer and W. Tseng and Joseph Pellegrino}, title = {Diffuse Reflectance Spectroscopy for In Situ Process Monitoring and Control During Molecular Beam Epitaxy Growth of InGaAs Pseudomorphic High Electron Mobility Transistors}, year = {2000}, month = {2000-09-29 00:09:00}, publisher = {Journal of Vacuum Science and Technology}, language = {en}, }