@conference{769556, author = {John Martinis and Kent Irwin and David Wollman and Gene Hilton and L Dulcie and Norman Bergren}, title = {The Next Generation of EDS: Microcalorimeter EDS with 3 eV Energy Resolution}, year = {1998}, month = {1998-07-01 00:07:00}, publisher = {Proc., Microscopy & Microanalysis 1998, Atlanta, GA, USA}, language = {en}, }