@article{769506,
  author = {T Keller and Alexana Roshko and R.H. Geiss and Kristine Bertness and T.P. Quinn},
  title = {EBSD Measurement of Strains in GaAs due to Oxidation of Buried AlGaAs Layers},
  year = {2004},
  number = {75},
  month = {2004-02-27 00:02:00},
  publisher = {Microelectronics Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31470},
  language = {en},
}