@article{769476,
  author = {Rolf Jaeger and Jesus Del Alamo and Masumi Fukuta and Herbert Bennett and Christopher Snowden},
  title = {Special Section on Compound Semiconductor Microelectronics Manufacturing: The Future Is Here},
  year = {2003},
  number = {16},
  month = {2003-08-01 00:08:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}