@article{769341,
  author = {Richard Allen and Michael Cresswell and Loren Linholm},
  title = {Junction-Isolated Electrical Test Structures for Critical Dimension Calibration Standards},
  year = {2004},
  number = {17},
  month = {2004-05-01 00:05:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}