@conference{769281,
  author = {Loucas Christophorou and James Olthoff},
  title = {Applications of Electron-Interaction Reference Data to the Semiconductor Industry},
  year = {1998},
  month = {1998-12-01 00:12:00},
  publisher = {Characterization and Metrology for ULSI Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=6001},
  language = {en},
}