@article{769161,
  author = {Martin Misakian and Eric Benck and Yicheng Wang},
  title = {Time Evolution of Ion Energy Distributions and Optical Emission in Pulsed Inductively Coupled Radio Frequency Plasmas},
  year = {2000},
  number = {88},
  month = {2000-10-01 00:10:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28915},
  language = {en},
}