@article{768976,
  author = {Michael Janezic and Dylan Williams and V. Blaschke and A. Karamcheti and Fengbo Hang},
  title = {Permittivity Characterization of Low-k Thin films from Transmission-Line Measurements},
  year = {2003},
  number = {51},
  month = {2003-01-01 00:01:00},
  publisher = {IEEE Transactions on Microwave Theory and Techniques},
  doi = {https://doi.org/10.1109/TMTT.2002.806925},
  language = {en},
}