@conference{767831,
  author = {Michael Postek and William Keery and S. Jones},
  title = {Metrological Electron Microscope for the Certification of Magnification and Linewidth Artifacts for the Semiconductor Industry},
  year = {1989},
  number = {1087},
  month = {1989-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control III, Los Angeles, CA, USA},
  language = {en},
}