@article{767706,
  author = {S. Bagchi and J. Lee and S. Krause and Peter Roitman},
  title = {Mechanism of Defect Formation in Low-Dose Oxygen Implanted Silicon-On-Insulator},
  year = {1996},
  number = {25},
  month = {1996-01-01 00:01:00},
  publisher = {Journal of Electronic Materials},
  language = {en},
}