@conference{767286,
  author = {J Lowney and Andras Vladar and Michael Postek},
  title = {High-Accuracy Critical-Dimension Metrology Using a Scanning Electron Microscope},
  year = {1996},
  number = {2725},
  month = {1996-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Metrology Inspection and Process Control for Microlithography X, Santa Clara, CA, USA},
  language = {en},
}