@article{767221, author = {David Wollman and Dale Newbury and Gene Hilton and Kent Irwin and David Rudman and L Dulcie and Norman Bergren and John Martinis}, title = {Microcalorimeter Energy Dispersive Spectrometry for Low Voltage SEM}, year = {1999}, number = {5}, month = {1999-12-31 00:12:00}, publisher = {Microscop. Microanal.}, language = {en}, }