@conference{766661,
  author = {Thomas Shaffner and Alain Diebold and R. McDonald and David Seiler and W Bullis},
  title = {Business and Manufacturing Motivations for the Development of Analytical Technology and Metrology for Semiconductors},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA},
  language = {en},
}