@conference{766446,
  author = {E Teague and Loren Linholm and Michael Cresswell and William Penzes and John Kramar and Fredric Scire and John Villarrubia and Jay Jun},
  title = {Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry},
  year = {1993},
  month = {1993-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Sitges, 1, SP},
  language = {en},
}