@conference{766391, author = {Peter Roitman and David Simons and S. Visitserngtrakul and C. Jung and S. Krause}, title = {Effect of Annealing Ambient on the Precipitation Processes in Oxygen-Implanted Silicon-on-Insulator Material, Extended Abstract}, year = {1990}, month = {1990-12-31 00:12:00}, publisher = {Proc., 12th International Congress for Electron Microscopy, Seattle, WA, USA}, language = {en}, }