@conference{766371,
  author = {Peter Roitman and G. Davis},
  title = {Selected Area channeling Pattern and Defect Etch Study of Silicon Implanted with Oxygen, MIcrobeam Analysis - 1988},
  year = {1988},
  month = {1988-12-31 00:12:00},
  publisher = {Proc.,  22nd Annual Conference, Materials Analysis Society, Milwaukee, WI, USA},
  language = {en},
}