@conference{766191,
  author = {Joseph Kopanski and J Lowney and D. Miles and Donald Novotny and G. Carver},
  title = {High Spatial Resolution Mapping of Semiconductor Resistivity},
  year = {1991},
  number = {91-1},
  month = {1991-12-31 00:12:00},
  publisher = {Extended Abstracts of the Electrochemical Society, Washington, DC, USA},
  language = {en},
}