@conference{766181,
  author = {G. Neubauer and A. Erickson and C. Williams and Joseph Kopanski and M. Rodgers and D. Adderton},
  title = {2D-Scanning Capacitance Microscopy Measurement of Cross-Sectional VLSI Test Structures},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA},
  language = {en},
}