@conference{765676,
  author = {Richard Allen and Michael Cresswell and Loren Linholm and Jinsheng Wen and Colleen Hood and T. Hill and J. Benecke and S. Volk and H. Stewart},
  title = {Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process},
  year = {1994},
  number = {7},
  month = {1994-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA},
  language = {en},
}