@article{765566,
  author = {Richard Allen and T Headley and Sarah Everist and Rathindra Ghoshtagore and Michael Cresswell and Loren Linholm},
  title = {High-Resolution Transmission Electron Microscopy Calibration of Critical Dimension Reference Materials},
  year = {2001},
  number = {14},
  month = {2001-02-01 00:02:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}