@conference{765546,
  author = {Kristine Bertness and S. Hays and Robert Hickernell},
  title = {Multifunctional Optical In Situ Monitoring of Semiconductor Film Growth},
  year = {1999},
  number = {570},
  month = {1999-09-01 00:09:00},
  publisher = {Proc., Mat. Res. Soc. Symp. on Epitaxial Growth-Principles and Applications, San Francisco, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24323},
  language = {en},
}