@conference{765406,
  author = {Kristine Bertness and J Armstrong and Ryna Marinenko and Larry Robins and Albert Paul and Joseph Pellegrino and Paul Amirtharaj and Deane Chandler-Horowitz},
  title = {AlGaAs Composition Measurements from In Situ Optical Reflectance},
  year = {2000},
  month = {2000-07-01 00:07:00},
  publisher = {Conf. Dig., LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing, Aventura, FL, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26476},
  language = {en},
}