@conference{765271, author = {S. Novak and J. Zavada and K. Malone}, title = {Using Secondary Ion Mass Spectrometry (SIMS) to Characterize Optical Waveguide Materials}, year = {1994}, month = {1994-01-01 00:01:00}, publisher = {Proc., 28th Annual Microbeam Analysis Society Mtg., , New Orleans, LA}, language = {en}, }