@conference{765126,
  author = {J Lowney and Michael Postek and Andras Vladar},
  title = {A Monte Carlo Model for SEM Linewidth Metrology},
  year = {1994},
  number = {2196},
  month = {1994-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA},
  language = {en},
}