@article{764916,
  author = {J Kolodzey and E Chowdhury and T Adam and G Qui and I Rau and J Olowolafe and John Suehle and Y Chen},
  title = {Electrical Conduction and Dielectric Breakdown in Aluminum Oxide Insulators on Silicon},
  year = {2000},
  number = {47},
  month = {2000-03-23 00:03:00},
  publisher = {IEEE Transactions on Electron Devices},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30168},
  language = {en},
}