@article{764771, author = {J. Morillo and Q. Su and B. Panchapakesan and Matthias Wuttig and Donald Novotny}, title = {Micromachined Silicon Torsional Resonator for Magnetic Anisotropy Measurement}, year = {1998}, number = {69}, month = {1998-11-01 00:11:00}, publisher = {Review of Scientific Instruments}, language = {en}, }