@article{764496, author = {Yong Cho and Nhan Nguyen and Curt Richter and James Ehrstein and Byoung Lee and Jack Lee}, title = {Spectroscopic Ellipsometry Characterization of High-K Dielectric HfO2 Thin Films and the High-Temperature Annealing on Their Optical Properties}, year = {2002}, number = {80}, month = {2002-02-18 00:02:00}, publisher = {Applied Physics Letters}, language = {en}, }