@conference{763941,
  author = {Richard Allen and Michael Cresswell and Christine Murabito and William Guthrie and Loren Linholm and Colleen Hood and E. Bogardus},
  title = {Test Structures for Referencing Electronics Linewidth Measurements to Silicon Lattice Parameters Using HRTEM},
  year = {2002},
  month = {2002-04-08 00:04:00},
  publisher = {Proc., 2002 ICMTS, Cork, 1, EI},
  language = {en},
}