@misc{763806, author = {S. Djurovic and J Roberts and Mark Sobolewski and James Olthoff}, title = {Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon}, year = {1993}, number = {98}, month = {1993-03-01 00:03:00}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=2222}, language = {en}, }