@conference{763291, author = {Robert Geer and D. Wu and David Wollman}, title = {High-resolution EDS Analysis of Ultra-Thin TaSiN Diffusion Barriers for Cu Metallization using Microcalorimetry}, year = {2001}, month = {2001-12-31 00:12:00}, publisher = {Proc., IEEE 2001 International (Interconnect Tech. Conf.), Burlingame, CA}, language = {en}, }