@article{762576,
  author = {Richard Allen and B Am ende and Michael Cresswell and Christine Murabito and T Headley and William Guthrie and Loren Linholm and Colleen Hood and E. Bogardus},
  title = {Test Structures for Referencing Electrical Linewidth Measurements to Silicon Lattice Parameters Using HRTEM},
  year = {2003},
  number = {16},
  month = {2003-05-01 00:05:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}