@article{762346,
  author = {H. Wan and J. Moore and James Olthoff and Richard Van Brunt},
  title = {Electron Scattering and Dissociative Attachment by SF6 and Its Electrical-Discharge By-Products},
  year = {1993},
  month = {1993-03-01 00:03:00},
  publisher = {Plasma Chemistry and Plasma Processing},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=14452},
  language = {en},
}