@conference{761961,
  author = {E. Cortesi and M. El-Ghor and H. Hosack and L. Allen and Peter Roitman and S. Krause},
  title = {Evaluation of Secco Etch Technique for Determination of Dislocation Densities in SIMOX Wafers, Extended Abstract},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA},
  language = {en},
}