@conference{761701,
  author = {David Christensen and Robert Hickernell and D. Schaafsma and Joseph Pellegrino and M. McCollum and J. Hill and R. Rai},
  title = {Correlation of Optical, X-Ray, and Electron Microscopy Measurements on Semiconductor Multilayer Structures},
  year = {1994},
  number = {2141},
  month = {1994-01-01 00:01:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Undefined},
  language = {en},
}