@article{761681,
  author = {Amanda Goyettes and Yicheng Wang and Martin Misakian and James Olthoff},
  title = {Ion fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8},
  year = {2000},
  month = {2000-11-01 00:11:00},
  publisher = {Journal of Vacuum Science and Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16166},
  language = {en},
}