@conference{761391,
  author = {Joaquin Martinez and John Dagata and Curt Richter and Richard Silver},
  title = {Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology},
  year = {2004},
  number = {3},
  month = {2004-03-07 00:03:00},
  publisher = {2004 Nanotechnology Conference and Trade Show, Boston, MA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31539},
  language = {en},
}